Underfill compounds including electrically charged filler elements, microelectronic devices having underfill compounds including electrically charged filler elements, and methods of underfilling microelectronic devices

ABSTRACT

Underfill compounds including electrically charged filler elements, microelectronic devices having underfill compounds including electrically charged filler elements, and methods of disposing underfill including electrically charged filler elements on microelectronic devices are disclosed herein. In one embodiment, a microelectronic device includes a microelectronic component, a plurality of electrical couplers carried by the microelectronic component, and an underfill layer covering at least a portion of the electrical couplers. The underfill layer comprises a binder and a plurality of electrically charged filler elements in the binder. The underfill layer can include a first zone having a first concentration of electrically charged filler elements and a second zone having a second concentration of electrically charged filler elements different than the first concentration.

TECHNICAL FIELD

[0001] The present invention relates to underfill compounds includingelectrically charged filler elements, microelectronic devices havingunderfill compounds including electrically charged filler elements, andmethods of disposing underfill compounds having electrically chargedfiller elements on microelectronic devices.

BACKGROUND

[0002] Microelectronic device assemblies, such as memory devices andmicroprocessors, typically include one or more microelectroniccomponents attached to a substrate. The microelectronic componentscommonly include at least one die having functional features such asmemory cells, integrated circuits, and interconnecting circuitry. Thedies of the microelectronic components may be encased in a plastic,ceramic, or metal protective covering. Each die commonly includes anarray of very small bond-pads electrically coupled to the functionalfeatures. The bond-pads can be used to operatively connect themicroelectronic component to the substrate.

[0003] One type of microelectronic component is a “flip-chip”semiconductor device. These components are referred to as “flip-chips”because they are typically manufactured on a wafer and have an activeside with bond-pads that initially face upward. After manufacture iscompleted and a die is singulated, the die is inverted or “flipped” suchthat the active side bearing the bond-pads faces downward for attachmentto a substrate. The bond-pads are usually coupled to terminals, such asconductive “bumps,” that electrically and mechanically connect the dieto the substrate. The bumps on the flip-chip can be formed from solders,conductive polymers, or other materials. In applications using solderbumps, the solder bumps are reflowed to form a solder joint between theflip-chip component and the substrate. This leaves a small gap betweenthe flip-chip and the substrate. To enhance the integrity of the jointbetween the microelectronic component and the substrate, an underfillmaterial is introduced into the gap. The underfill material bears someof the stress placed on the components and protects the components frommoisture, chemicals and other contaminants. The underfill material caninclude filler particles to increase the rigidity of the material andmodify the coefficient of thermal expansion of the material.

[0004] The underfill material typically is dispensed into the underfillgap by depositing a bead of the underfill material along one or twosides of the flip-chip when the underfill material is in a fluidic state(i.e., flowable). As shown schematically in FIG. 1, a bead of anunderfill material U may be dispensed along one side of the die D. Theflowable underfill material will then be drawn into the gap between thedie D and the substrate S by capillary action. The direction of thismovement is indicated by the arrows in FIG. 1. After the underfillmaterial fills the gap, it is cured to a hardened state. Although such a“single stroke” process yields good results, the processing timenecessary to permit the underfill material U to flow across the entirewidth of the die can reduce the throughput of the manufacturing process.

[0005]FIG. 2 illustrates an alternative approach wherein the underfillmaterial U is applied in an L-shaped bead along two adjacent sides ofthe die D. By reducing the average distance that the underfill materialhas to flow to fill the underfill gap, processing times can be reduced.The L-stroke approach, however, can lead to more voids in the underfillmaterial, which adversely affect the integrity of the bond between thedie D and the substrate S.

[0006] In the single stroke and L-stroke approaches, the fillerparticles can become segregated from the polymer fluid as the underfillmaterial flows across the die. Consequently, one side of the flip-chipoften has a greater concentration of filler particles. The nonuniformdistribution of filler particles creates differences in the rigidity andthe coefficient of thermal expansion of the underfill material acrossthe die.

[0007] In other embodiments, the underfill material may be depositedacross a plurality of dies at the wafer-level to form an underfilllayer. After the underfill layer is formed, the dies can be singulatedand attached to substrates. Forming an underfill layer with fillerparticles on a die before attaching a substrate to the die has somedrawbacks. For example, the filler particles in the portion of theunderfill layer above the conductive bumps can obstruct the connectionbetween the conductive bumps of the die and the substrate. To preventthe filler particles from interfering with the connection, one approachis to form two underfill layers on the die. The first underfill layerincludes filler particles and has a thickness no greater than the heightof the conductive bumps. The second underfill layer is formed over thefirst layer and does not contain filler particles. This approach,however, requires two dispensers and two types of underfill material.Another approach is to form the underfill layer on the die at thewafer-level before forming the conductive bumps. Next, vias are formedin the underfill layer and the conductive bumps are formed in the vias.This approach, however, is complicated and can result in contaminationof the underfill layer and/or the conductive bumps. Moreover, it isdifficult to deposit solder paste in very small vias. Another approachis to form the underfill layer over the die and the conductive bumps,then remove the top portion of the underfill layer so that the underfilllayer has a thickness equal to the height of the conductive bumps. Thisapproach also is complicated, requires cleaning, and may contaminate thedevice. Accordingly, a new method for forming an underfill layer thathas filler particles is needed.

SUMMARY OF THE INVENTION

[0008] The present invention is directed to underfill compoundsincluding electrically charged filler elements, microelectronic deviceshaving underfill compounds including electrically charged fillerelements, and methods of disposing underfill compounds includingelectrically charged filler elements on microelectronic devices. Oneaspect of the invention is directed to a composition for use in anunderfill layer of a microelectronic device. In one embodiment, thecomposition includes a flowable binder and a plurality of electricallycharged filler elements disposed within the flowable binder. Theelectrically charged filler elements can include silica, siliconnitride, aluminum oxide, and/or aluminum nitride. The flowable bindercan include a liquid polymer.

[0009] Another aspect of the invention is directed to a microelectronicdevice. In one embodiment, the microelectronic device includes amicroelectronic component, a plurality of electrical couplers carried bythe microelectronic component, and an underfill layer covering at leasta portion of the plurality of electrical couplers. The underfill layercomprises a binder and a plurality of electrically charged fillerelements in the binder. In one aspect of this embodiment, the underfilllayer also includes a first zone having a first concentration ofelectrically charged filler elements and a second zone having a secondconcentration of electrically charged filler elements different from thefirst concentration. The first zone can include the portion of theunderfill layer between the distal ends of the electrical couplers, andthe second zone can include the portion of the underfill layer betweenthe distal ends of the electrical couplers and a distal surface of theunderfill layer. Alternatively, the underfill layer can include a firstzone and a plurality of second zones. The second zones can be generallyhemispherical and extend between the distal surface of the underfilllayer and the distal ends of the electrical couplers.

[0010] Another aspect of the invention is directed to a method fordisposing underfill material on a microelectronic device having aplurality of electrical couplers. In one embodiment, the method includesdepositing an underfill layer onto the microelectronic device andcovering at least a portion of the electrical couplers. The underfilllayer includes a binder and a plurality of electrically charged fillerelements in the binder. The method further includes applying an electricfield to the underfill layer to manipulate at least a portion of theelectrically charged filler elements. In one aspect of this embodiment,applying the electric field includes moving at least a portion of theelectrically charged filler elements from a first zone into a secondzone.

[0011] Another aspect of the invention is directed to a method ofunderfilling a microelectronic device assembly including amicroelectronic component, a substrate, and a plurality of electricalcouplers coupling the microelectronic component to the substrate. In oneembodiment, the method includes disposing an underfill layer including aplurality of electrically charged filler elements between themicroelectronic component and the substrate and moving at least aportion of the plurality of electrically charged filler elements withinthe underfill layer by applying an electric field to the underfilllayer.

BRIEF DESCRIPTION OF THE DRAWINGS

[0012]FIG. 1 is a schematic illustration of a prior art underfillprocess.

[0013]FIG. 2 is a schematic illustration of another prior art underfillprocess.

[0014] FIGS. 3-6 illustrate various stages in a method of disposing anunderfill material on a microelectronic device and attaching the deviceto a substrate.

[0015]FIG. 3 is a schematic side cross-sectional view of amicroelectronic workpiece including a plurality of microelectronicdevices after depositing an underfill layer.

[0016]FIG. 4A is a schematic side cross-sectional view of themicroelectronic devices after moving at least some of the electricallycharged filler elements within the underfill layer.

[0017]FIG. 4B is a schematic side cross-sectional view of a plurality ofmicroelectronic devices after moving at least some of the electricallycharged filler elements within an underfill layer in accordance withanother embodiment of the invention.

[0018]FIG. 5 is a schematic side cross-sectional view of themicroelectronic device of FIG. 4A after singulation.

[0019]FIG. 6 is a schematic side cross-sectional view of amicroelectronic device assembly.

[0020]FIG. 7 is a schematic side cross-sectional view of amicroelectronic workpiece having a plurality of microelectronic devicesin accordance with another embodiment of the invention.

[0021] FIGS. 8-10 illustrate various microelectronic device assembliesin accordance with additional embodiments of the invention.

[0022]FIG. 8 is a schematic side cross-sectional view of amicroelectronic device assembly including a microelectronic componentand a substrate coupled to the microelectronic component.

[0023]FIG. 9 is a schematic side cross-sectional view of amicroelectronic device assembly in accordance with another embodiment ofthe invention.

[0024]FIG. 10 is a schematic side cross-sectional view of amicroelectronic device assembly in accordance with another embodiment ofthe invention.

DETAILED DESCRIPTION

[0025] The following description is directed toward microelectronicdevices, microelectronic device assemblies, methods for disposingunderfill material on microelectronic devices, and methods forunderfilling microelectronic device assemblies. The term“microelectronic workpiece” is used throughout to include substratesupon which and/or in which microelectronic devices, micromechanicaldevices, data storage elements, and other features are fabricated. Forexample, microelectronic workpieces can be semiconductor wafers, glasssubstrates, insulative substrates, or many other types of substrates.Many specific details of several embodiments of the invention aredescribed below with reference to a microelectronic device including amicroelectronic die in order to provide a thorough understanding of suchembodiments. Those of ordinary skill in the art will thus understandthat the invention may have other embodiments with additional elementsor without several of the elements described in this section.

[0026] FIGS. 3-6 illustrate various stages in a method of disposing anunderfill material on a microelectronic device and attaching the deviceto a substrate. In the illustrated method, an underfill material isdisposed on a plurality of microelectronic devices as part of a batchprocess. In other embodiments, the underfill material can be disposed ona single microelectronic device according to the illustrated method.

[0027]FIG. 3 is a schematic side cross-sectional view of amicroelectronic workpiece including a plurality of microelectronicdevices 100 (identified individually as 100 a-c) after depositing anunderfill layer 150 in accordance with one embodiment of the invention.The microelectronic devices 100 can be formed on a substrate 108, andeach device 100 can include a microelectronic component such as a die110 having an integrated circuit 111 (shown schematically) and aplurality of bond-pads 112 coupled to the integrated circuit 111. Themicroelectronic devices 100 can each include a redistribution assembly120 with ball-pads 122 and traces 124 for coupling the bond-pads 112 ofa corresponding die 110 to a printed circuit board or other device. Theball-pads 122 are arranged in ball-pad arrays relative to the dies 110such that each die 110 has a corresponding array of ball-pads 122. Theredistribution assemblies 120 can be separate components of aredistribution layer 125 that include a dielectric stratum 126separating the traces 124 and the ball-pads 122.

[0028] In the illustrated embodiment, the microelectronic devices 100also include a plurality of electrical couplers 130, such as solderballs, formed on corresponding ball-pads 122 of the redistributionassembly 120. In other embodiments, the microelectronic devices may notinclude a redistribution assembly. In these embodiments, the electricalcouplers can be formed directly on the bond-pads of the microelectronicdies or other types of electrical terminals coupled to the dies.

[0029] The microelectronic devices 100 of FIG. 3 include the underfilllayer 150 to protect the devices 100 from moisture, chemicals andcontaminants. In one aspect of the illustrated embodiment, the underfilllayer 150 has a thickness T₁ greater than the height T₂ of theelectrical couplers 130. In other embodiments, the underfill layer 150may not cover all of the electrical couplers 130. In another aspect ofthe illustrated embodiment, the underfill layer 150 includes a flowablematrix or binder 151 and a plurality of electrically charged fillerelements 152 disposed within the binder 151. The binder 151 can includean epoxy, a resin, or suitable material. The electrically charged fillerelements 152 can be micelles including an organic substance and fillerparticles in the organic substance. The filler particles can be silica,silicon nitride, aluminum nitride, aluminum oxide, or other suitablematerials. In the illustrated embodiment, the electrically chargedfiller elements 152 have a positive charge. In other embodiments, theelectrically charged filler elements can have a negative charge. Theelectrically charged filler elements 152 increase the rigidity andmodify the coefficient of thermal expansion of the underfill layer 150.

[0030]FIG. 4A is a schematic side cross-sectional view of themicroelectronic devices 100 after moving at least some of theelectrically charged filler elements 152 within the underfill layer 150while the binder 151 is in a flowable state. In the illustratedembodiment, each electrical coupler 130 has a proximal end 131 coupledto a corresponding ball-pad 122 and a distal end 132 opposite theproximal end 131. The distal ends 132 of the electrical couplers 130define a plane P₁ that divides the underfill layer 150 into a first zoneZ₁ and a second zone Z₂. The first zone Z₁ includes the portion of theunderfill layer 150 between the plane P₁ and the redistribution layer125, and the second zone Z₂ includes the portion of the underfill layer150 between the plane P₁ and a surface 153 of the underfill layer 150.

[0031] In one aspect of the illustrated embodiment, an electric fieldsource 160, such as a charged plate, selectively generates an electricfield to move the electrically charged filler elements 152 within theunderfill layer 150. For example, the electric field source 160 canrepel the electrically charged filler elements 152 causing at least someof the elements 152 to move from the second zone Z₂ to the first zoneZ₁. Accordingly, the concentration of electrically charged fillerelements 152 in the second zone Z₂ is less than the concentration ofelectrically charged filler elements 152 in the first zone Z₁. Removingthe electrically charged filler elements 152 from the second zone Z₂ ofthe underfill 150 allows the electrical couplers 130 to be properly andreliably connected to another device, such as a printed circuit board,as will be described in detail below.

[0032] After the electrically charged filler elements 152 have beenmoved to the first zone Z₁ of the underfill layer 150, the underfilllayer 150 can be partially cured, such as to a “B” stage (partiallylinked), to prevent the elements 152 from migrating back into the secondzone Z₂. The substrate 108 of the microelectronic devices 100 can alsobe back ground to reduce the profile of the devices 100. After curing,the substrate 108, redistribution layer 125, and the underfill layer 150can be cut along lines A₁ and A₂ to singulate the microelectronicdevices 100.

[0033]FIG. 4B is a schematic side -cross-sectional view of a pluralityof microelectronic devices 200 after moving at least some of theelectrically charged filler elements 152 within an underfill layer 250in accordance with another embodiment of the invention. In thisembodiment, a plurality of electric field sources 260 generate discreteelectric fields to repel the electrically charged filler elements 152from a plurality of second zones Z₄ to a first zone Z₃. The second zonesZ₄ can be generally hemispherical and can include the portion of theunderfill layer 250 between a surface 253 of the underfill layer 250 andthe distal ends 132 of the electrical couplers 130. The first zone Z₃includes the portion of the underfill layer 250 outside the second zonesZ₄. After the electrically charged filler elements 152 have moved fromthe second zones Z₄, the underfill layer 250 can be partially cured toprevent the electrically charged filler elements 152 from moving backinto the second zones Z₄. Furthermore, as described above with referenceto FIG. 4A, the microelectronic devices 200 can be back ground andsingulated.

[0034]FIG. 5 is a schematic side cross-sectional view of themicroelectronic device 100 a of FIG. 4A after singulation. Thesingulated microelectronic device 100 a can be attached to a substrate370, such as a printed circuit board. The substrate 370 includes aplurality of contacts 372 aligned with the electrical couplers 130 ofthe microelectronic device 100 a. To attach the substrate 370 to themicroelectronic device 100 a, the contacts 372 are pressed into thesecond zone Z₂ of the underfill layer 150. As discussed above, thesecond zone Z₂ of the underfill layer 150 does not include electricallycharged filler elements 152, and thus the filler elements 152 do notinterfere with the connection between the electrical couplers 130 andthe contacts 372.

[0035]FIG. 6 is a schematic side cross-sectional view of amicroelectronic device assembly 480 including the microelectronic device100 a attached to the substrate 370. After the contacts 372 of thesubstrate 370 are positioned against the electrical couplers 130, themicroelectronic device assembly 480 can pass through the reflow processto melt the solder balls 130 and to securely join the ball-pads 122 tothe contacts 372. Furthermore, the underfill layer 150 can be fullycured.

[0036] One advantage of the method illustrated in FIGS. 3-6 is that afillet 454 is created in the underfill 150 and 250 that increases therigidity of the microelectronic device assembly 480. More specifically,as the contacts 372 are pressed into the underfill 150 and 250, aportion of the underfill 150 and 250 is forced outward, creating thefillet 454 between the substrate 370 and the microelectronic device 100.

[0037] Another advantage of the microelectronic device assembly 480 isthe improved electrical connection and mechanical bond between thecontacts 372 and the electrical couplers 130. In the prior art, beforethe substrate was attached to the microelectronic device, the portion ofthe underfill between the contacts of the substrate and the electricalcouplers of the microelectronic device included filler particles. Whenthe substrate was attached to the microelectronic device these fillerparticles sometimes were trapped between the contacts and the electricalcouplers. Consequently, these filler particles degraded the electricalconductivity and the mechanical integrity of the connection. In themethod illustrated in FIGS. 3-6, the filler elements 152 are moved outof the portion of the underfill layer 150 and 250 between the contacts372 and the electrical couplers 130 before attachment to prevent thefiller elements 152 from becoming trapped between the contacts 372 andthe electrical couplers 130. Accordingly, the microelectronic deviceassembly 480 has an improved electrical connection and mechanical bondbetween the substrate 370 and the microelectronic device 100 a.Furthermore, with the method illustrated in FIGS. 3-6, it is notnecessary to remove a top layer of the underfill layer 150 and 250 andexpose the electrical couplers 130 in order to achieve the improvedconnection between the contacts 372 and the electrical couplers 130.Accordingly, the elimination of this planarizing step reduces themechanical stress on the electrical couplers 130 and the contaminationof the underfill layer 150 and 250.

[0038]FIG. 7 is a schematic side cross-sectional view of amicroelectronic workpiece having a plurality of microelectronic devices500 in accordance with another embodiment of the invention. Themicroelectronic devices 500 can be similar to the microelectronicdevices 100 discussed above with reference to FIG. 3. For example, themicroelectronic devices 500 include an underfill layer 550 having afirst zone Z₁, a second zone Z₂, and a plurality of electrically chargedfiller elements 152. In the illustrated embodiment, an electric fieldsource 560 attracts the electrically charged filler elements 152 to movethem into the second zone Z₂ of the underfill layer 550. Next, theunderfill layer 550 can be at least partially cured, and the second zoneZ₂ of the underfill layer 550 can be removed from the microelectronicdevices 500 by planarization or another suitable method. After thesecond zone Z₂ of the underfill layer 550 is removed, themicroelectronic devices 500 can be diced and attached to substrateswithout filler elements 152 interfering with the connection between thecontacts on the substrate and the electrical couplers 130.

[0039] FIGS. 8-10 illustrate various microelectronic device assembliesin accordance with additional embodiments of the invention. FIG. 8 is aschematic side cross-sectional view of a microelectronic device assembly600 including a microelectronic component 610 and a substrate 670coupled to the microelectronic component 610. The microelectroniccomponent 610 includes a plurality of ball-pads 622 coupled tocorresponding contacts 672 on the substrate 670 by electrical couplers630.

[0040] The microelectronic device assembly 600 also includes anunderfill layer 650 having a plurality of electrically charged fillerelements 652. The underfill layer 650 can be applied to themicroelectronic device assembly 600 by dispensing a bead of underfillmaterial along one side of the microelectronic component 610. Theunderfill material will then be drawn into the gap between themicroelectronic component 610 and the substrate 670 by capillary action,as described above with reference to FIGS. 1 and 2. Alternatively, theunderfill layer 650 can be applied to the microelectronic deviceassembly 600 by the method described above with reference to FIGS. 3-6.In one aspect of the illustrated embodiment, the electrically chargedfiller elements 652 have the same charge and consequently repel eachother. Accordingly, the electrically charged filler elements 652disperse throughout the underfill layer 650, creating a generallyuniform distribution of the elements 652. The generally uniformdistribution of electrically charged filler elements 652 provides agenerally uniform coefficient of thermal expansion across themicroelectronic device assembly 600.

[0041]FIG. 9 is a schematic cross-sectional side view of amicroelectronic device assembly 700 in accordance with anotherembodiment of the invention. The microelectronic device assembly 700 isgenerally similar to the microelectronic device assembly 600 describedabove with reference to FIG. 8. For example, the microelectronic deviceassembly 700 includes a microelectronic component 610, a substrate 670coupled to the microelectronic component 610, and an underfill layer 750having a plurality of electrically charged filler elements 652 disposedbetween the microelectronic component 610 and the substrate 670. In oneaspect of the illustrated embodiment, a plane P₂ generally equidistantfrom the microelectronic component 610 and the substrate 670 divides theunderfill layer 750 into a first zone Z₅ and a second zone Z₆. In otherembodiments, the plane P₂ may not be equidistant from themicroelectronic component 610 and the substrate 670. In the illustratedembodiment, an electric field source 760 repels the electrically chargedfiller elements 652, and consequently moves the filler elements 652 intothe second zone Z₆. The greater concentration of the electricallycharged filler elements 652 in the second zone Z₆ reduces thecoefficient of thermal expansion of the second zone Z₆. Accordingly, thecoefficient of thermal expansion of the second zone Z₆ is less than thecoefficient of thermal expansion of the first zone Z₅.

[0042]FIG. 10 is a schematic side cross-sectional view of amicroelectronic device assembly 800 in accordance with anotherembodiment of the invention. The microelectronic device assembly 800 isgenerally similar to the microelectronic device assembly 600 describedabove with reference to FIG. 8. For example, the microelectronic deviceassembly 800 includes a microelectronic component 610, a substrate 670coupled to the microelectronic component 610, and an underfill layer 850having a plurality of electrically charged filler elements 652 disposedbetween the microelectronic component 610 and the substrate 670. In oneaspect of the illustrated embodiment, the electric field source 860attracts the electrically charged filler elements 652 and consequentlymoves the filler elements 652 into a first zone Z₇. The greaterconcentration of the electrically charged filler elements 652 in thefirst zone Z₇ reduces the coefficient of thermal expansion of the firstzone Z₇. Accordingly, the coefficient of thermal expansion of the firstzone Z₇ is less than the coefficient of thermal expansion of a secondzone Z₈.

[0043] From the foregoing, it will be appreciated that specificembodiments of the invention have been described herein for purposes ofillustration, but that various modifications may be made withoutdeviating from the spirit and scope of the invention. Accordingly, theinvention is not limited except as by the appended claims.

I/we claim:
 1. A microelectronic device, comprising: a microelectroniccomponent having an integrated circuit and bond-pads coupled to theintegrated circuit; a plurality of electrical couplers coupled to thebond-pads of the microelectronic component; and an underfill layercovering at least a portion of the plurality of electrical couplers,wherein the underfill comprises a binder and a plurality of electricallycharged filler elements in the binder.
 2. The microelectronic device ofclaim 1 wherein the electrically charged filler elements comprisesilica.
 3. The microelectronic device of claim 1 wherein the underfilllayer includes a first zone having a first concentration of electricallycharged filler elements and a second zone having a second concentrationof electrically charged filler elements different than the firstconcentration.
 4. The microelectronic device of claim 1 wherein theunderfill layer includes a first zone having a first concentration ofelectrically charged filler elements and a second zone having a secondconcentration of electrically charged filler elements different than thefirst concentration, and wherein the binder is at least partially curedbinder.
 5. The microelectronic device of claim 1 wherein the electricalcouplers include a proximal end proximate to the microelectroniccomponent and a distal end opposite the proximal end, wherein the distalends of the electrical couplers define a plane that divides theunderfill layer into a first zone between the plane and themicroelectronic component and a second zone opposite the first zone, andwherein the first zone has a first concentration of electrically chargedfiller elements and the second zone has a second concentration ofelectrically charged filler elements less than the first concentration.6. The microelectronic device of claim 1 wherein the electrical couplersinclude a proximal end proximate to the microelectronic component and adistal end opposite the proximal end, wherein the distal ends of theelectrical couplers define a plane that divides the underfill layer intoa first zone between the plane and the microelectronic component and asecond zone opposite the first zone, and wherein the first zone has afirst concentration of electrically charged filler elements and thesecond zone has a second concentration of electrically charged fillerelements greater than the first concentration.
 7. The microelectronicdevice of claim 1 wherein the electrical couplers include a proximal endproximate to the microelectronic component and a distal end opposite theproximal end, wherein underfill layer further includes a first surfaceproximate to the microelectronic component, a second surface oppositethe first surface, a first zone having a first concentration ofelectrically charged filler elements, and a second zone having a secondconcentration of electrically charged filler elements less than thefirst concentration, wherein the second zone is generally hemisphericaland extends between the second surface and the distal end of one of theelectrical couplers.
 8. The microelectronic device of claim 1 whereinthe electrical couplers comprise solder balls electrically coupled tothe microelectronic component.
 9. The microelectronic device of claim 1wherein the microelectronic component comprises a microelectronic die.10. A microelectronic workpiece, comprising: a plurality ofmicroelectronic components; a plurality of electrical couplers arrangedin discrete arrays that are electrically coupled to correspondingmicroelectronic components; and an underfill layer over at least aportion of the plurality of electrical couplers, wherein the underfilllayer comprises a binder and a plurality of electrically charged fillerelements in the binder, and wherein the underfill layer includes a firstzone having a first concentration of the electrically charged fillerelements and a second zone having a second concentration of electricallycharged filler elements different than the first concentration.
 11. Themicroelectronic workpiece of claim 10 wherein the electrically chargedfiller elements comprise silica.
 12. The microelectronic workpiece ofclaim 10 wherein the binder is at least partially cured.
 13. Themicroelectronic workpiece of claim 10 wherein the electrical couplersinclude a proximal end proximate to the microelectronic component and adistal end opposite the proximal end, wherein the distal ends of theelectrical couplers define a plane that divides the underfill layer intothe first zone between the plane and the microelectronic component andthe second zone opposite the first zone, and wherein the firstconcentration of electrically charged filler elements is less than thesecond concentration of electrically charged filler elements.
 14. Themicroelectronic workpiece of claim 10 wherein the electrical couplersinclude a proximal end proximate to the microelectronic component and adistal end opposite the proximal end, wherein the distal ends of theelectrical couplers define a plane that divides the underfill layer intothe first zone between the plane and the microelectronic component andthe second zone opposite the first zone, and wherein the firstconcentration of electrically charged filler elements is greater thanthe second concentration of electrically charged filler elements. 15.The microelectronic workpiece of claim 10 wherein the electricalcouplers include a proximal end proximate to the microelectroniccomponent and a distal end opposite the proximal end, wherein underfilllayer further includes a first surface proximate to the microelectroniccomponent and a second surface opposite the first surface, and whereinthe second zone is generally hemispherical and extends between thesecond surface and the distal end of one of the electrical couplers. 16.The microelectronic workpiece of claim 10 wherein the microelectroniccomponents comprise microelectronic dies.
 17. A microelectronic deviceassembly, comprising: a microelectronic component having an integratedcircuit and bond-pads, coupled to the integrated circuit; a plurality ofelectrical couplers coupled to the bond-pads of the microelectroniccomponent; a substrate having contacts that are coupled to correspondingelectrical couplers; and an underfill layer between the microelectroniccomponent and the substrate, wherein the underfill comprises a binderand a plurality of electrically charged filler elements in the binder.18. The assembly of claim 17 wherein the electrically charged fillerelements comprise silica.
 19. The assembly of claim 17 wherein theelectrically charged filler elements are distributed generally uniformlythroughout the underfill layer.
 20. The assembly of claim 17 wherein theunderfill layer includes a first zone having a first concentration ofelectrically charged filler elements and a second zone having a secondconcentration of electrically charged filler elements different than thefirst concentration.
 21. The assembly of claim 17 wherein a planedivides the underfill layer into a first zone having a firstconcentration of electrically charged filler elements and a second zonehaving a second concentration of electrically charged filler elementsless than the first concentration, wherein the plane is generallyparallel to the microelectronic component and is between themicroelectronic component and the substrate, and wherein the first zoneincludes the portion of the underfill layer between the plane and themicroelectronic component and the second zone includes the portion ofthe underfill layer between the plane and the substrate.
 22. Theassembly of claim 17 wherein a plane divides the underfill layer into afirst zone having a first concentration of electrically charged fillerelements and a second zone having a second concentration of electricallycharged filler elements greater than the first concentration, whereinthe plane is generally parallel to the microelectronic component and isbetween the microelectronic component and the substrate, and wherein thefirst zone includes the portion of the underfill layer between the planeand the microelectronic component and the second zone includes theportion of the underfill layer between the plane and the substrate. 23.The assembly of claim 17 wherein a plane divides the underfill layerinto a first zone having a first coefficient of thermal expansion and asecond zone having a second coefficient of thermal expansion greaterthan the first coefficient, wherein the plane is generally parallel tothe microelectronic component and is between the microelectroniccomponent and the substrate, and wherein the first zone includes theportion of the underfill layer between the plane and the microelectroniccomponent and the second zone includes the portion of the underfilllayer between the plane and the substrate.
 24. The assembly of claim 17wherein a plane divides the underfill layer into a first zone having afirst coefficient of thermal expansion and a second zone having a secondcoefficient of thermal expansion less than the first coefficient,wherein the plane is generally parallel to the microelectronic componentand is between the microelectronic component and the substrate, andwherein the first zone includes the portion of the underfill layerbetween the plane and the microelectronic component and the second zoneincludes the portion of the underfill layer between the plane and thesubstrate.
 25. The assembly of claim 17 wherein the electrical couplerscomprise solder balls electrically coupled to the microelectroniccomponent.
 26. The assembly of claim 17 wherein the microelectroniccomponent comprises a microelectronic die.
 27. A microelectronic deviceassembly, comprising: a microelectronic component having a plurality ofpads; a plurality of electrical couplers electrically coupled tocorresponding pads; a substrate having contacts that are coupled tocorresponding electrical couplers; and an underfill layer between themicroelectronic component and the substrate, wherein the underfillcomprises a binder and a plurality of electrically charged fillerelements in the binder, and wherein the plurality of electricallycharged filler elements are distributed generally uniformly throughoutthe underfill.
 28. The assembly of claim 27 wherein the electricallycharged filler elements comprise silica.
 29. The assembly of claim 27wherein the electrical couplers comprise solder balls.
 30. The assemblyof claim 27 wherein the microelectronic component comprises amicroelectronic die.
 31. A microelectronic device assembly, comprising:a microelectronic component having a plurality of pads; a plurality ofelectrical couplers electrically coupled to the plurality of pads; asubstrate having contacts that are coupled to the electrical couplers;and an underfill layer between the microelectronic component and thesubstrate, wherein the underfill comprises a binder and a plurality ofelectrically charged filler elements in the binder, and wherein theunderfill layer includes a first zone having a first concentration ofelectrically charged filler elements and a second zone having a secondconcentration of electrically charged filler elements different than thefirst concentration.
 32. The assembly of claim 31 wherein theelectrically charged filler elements comprise silica.
 33. The assemblyof claim 31 wherein a plane divides the underfill layer into the firstzone and the second zone, wherein the plane is generally parallel to themicroelectronic component and is between the microelectronic componentand the substrate, wherein the first zone includes the portion of theunderfill layer between the plane and the microelectronic component andthe second zone includes the portion of the underfill layer between theplane and the substrate, and wherein the first concentration ofelectrically charged filler elements is greater than the secondconcentration.
 34. The assembly of claim 31 wherein a plane divides theunderfill layer into the first zone and the second zone, wherein theplane is generally parallel to the microelectronic component and isbetween the microelectronic component and the substrate, wherein thefirst zone includes the portion of the underfill layer between the planeand the microelectronic component and the second zone includes theportion of the underfill layer between the plane and the substrate, andwherein the first concentration of electrically charged filler elementsis less than the second concentration.
 35. The assembly of claim 31wherein a plane divides the underfill layer into the first zone and thesecond zone, wherein the plane is generally parallel to themicroelectronic component and is between the microelectronic componentand the substrate, wherein the first zone includes the portion of theunderfill layer between the plane and the microelectronic component andthe second zone includes the portion of the underfill layer between theplane and the substrate, and wherein the first zone has a firstcoefficient of thermal expansion and the second zone has a secondcoefficient of thermal expansion less than the first coefficient. 36.The assembly of claim 31 wherein a plane divides the underfill layerinto the first zone and the second zone, wherein the plane is generallyparallel to the microelectronic component and is between themicroelectronic component and the substrate, wherein the first zoneincludes the portion of the underfill layer between the plane and themicroelectronic component and the second zone includes the portion ofthe underfill layer between the plane and the substrate, and wherein thefirst zone has a first coefficient of thermal expansion and the secondzone has a second coefficient of thermal expansion greater than thefirst coefficient.
 37. A method for disposing underfill on amicroelectronic device having a plurality of electrical couplers, themethod comprising flowing an underfill material including a plurality ofelectrically charged filler elements onto the microelectronic device andcovering at least a portion of the electrical couplers.
 38. The methodof claim 37, further comprising manipulating at least a portion of theelectrically charged filler elements.
 39. The method of claim 37 whereinthe electrically charged filler elements comprise silica, and whereinflowing the underfill material comprises flowing the underfill materialincluding a plurality of electrically charged silica filler elements.40. The method of claim 37 wherein the microelectronic device comprisesa microelectronic die, and wherein flowing the underfill materialcomprises flowing the underfill material onto the microelectronic die.41. A method for disposing underfill material on a microelectronicdevice having a plurality of electrical couplers, the method comprising:depositing an underfill layer onto the microelectronic device andcovering at least a portion of the electrical couplers, the underfilllayer comprising a binder and a plurality of electrically charged fillerelements in the binder; and applying an electric field to the underfilllayer to manipulate at least a portion of the electrically chargedfiller elements.
 42. The method of claim 41 wherein the electricallycharged filler elements comprise silica, and wherein depositing theunderfill layer comprises depositing the underfill layer having aplurality of electrically charged silica filler elements.
 43. The methodof claim 41, further comprising at least partially curing the underfilllayer after applying the electric field.
 44. The method of claim 41wherein applying the electric field comprises moving at least a portionof the electrically charged filler elements from a first zone to asecond zone.
 45. The method of claim 41 wherein the microelectronicdevice comprises a microelectronic component, wherein the electricalcouplers include a proximal end proximate to the microelectroniccomponent and a distal end opposite the proximal end, wherein the distalends of the electrical couplers define a plane that divides theunderfill layer into a first zone between the plane and themicroelectronic component and a second zone opposite the first zone, andwherein applying the electric field comprises moving at least a portionof the electrically charged filler elements from the first zone to thesecond zone.
 46. The method of claim 41 wherein the microelectronicdevice comprises a microelectronic component, wherein the electricalcouplers include a proximal end proximate to the microelectroniccomponent and a distal end opposite the proximal end, wherein the distalends of the electrical couplers define a plane that divides theunderfill layer into a first zone between the plane and themicroelectronic component and a second zone opposite the first zone,wherein applying the electric field comprises moving at least a portionof the electrically charged filler elements from the first zone to thesecond zone, and wherein the method further comprises: at leastpartially curing the underfill layer; and removing the first zone of theunderfill layer from the microelectronic device.
 47. The method of claim41 wherein the microelectronic device comprises a microelectroniccomponent, wherein the electrical couplers include a proximal endproximate to the microelectronic component and a distal end opposite theproximal end, wherein the distal ends of the electrical couplers definea plane that divides the underfill layer into a first zone between theplane and the microelectronic component and a second zone opposite thefirst zone, and wherein applying the electric field comprises moving atleast a portion of the electrically charged filler elements from thesecond zone to the first zone.
 48. The method of claim 41 wherein themicroelectronic device comprises a microelectronic component, whereinthe electrical couplers include a proximal end proximate to themicroelectronic component and a distal end opposite the proximal end,wherein underfill layer includes a first surface proximate to themicroelectronic component, a second surface opposite the first surface,a first zone, and a second zone extending between the second surface andthe distal end of one of the electrical couplers, wherein the secondzone is generally hemispherical, and wherein applying the electric fieldcomprises moving at least a portion of the electrically charged fillerelements from the second zone to the first zone.
 49. The method of claim41, further comprising: at least partially curing the underfill layer;attaching the microelectronic device to a substrate; and reflowing themicroelectronic device.
 50. The method of claim 41, further comprising:at least partially curing the underfill layer; and dicing themicroelectronic device.
 51. A method for disposing underfill material ona microelectronic device having a plurality of electrical couplers, themethod comprising: covering at least a portion of the electricalcouplers of the microelectronic device with an underfill layer includinga matrix and a plurality of electrically charged filler elements; andmoving at least a portion of the electrically charged filler elementswithin the underfill by applying an electric field to the underfilllayer.
 52. The method of claim 51 wherein the electrically chargedfiller elements comprise silica, and wherein covering the electricalcouplers comprises depositing the underfill layer including a pluralityof electrically charged silica filler elements.
 53. The method of claim51 wherein the microelectronic device comprises a microelectroniccomponent, wherein the electrical couplers include a proximal endproximate to the microelectronic component and a distal end opposite theproximal end, wherein the distal ends of the electrical couplers definea plane that divides the underfill layer into a first zone between theplane and the microelectronic component and a second zone opposite thefirst zone, and wherein moving the electrically charged filler elementscomprises moving at least a portion of the electrically charged fillerelements from the first zone to the second zone.
 54. The method of claim51 wherein the microelectronic device comprises a microelectroniccomponent, wherein the electrical couplers include a proximal endproximate to the microelectronic component and a distal end opposite theproximal end, wherein the distal ends of the electrical couplers definea plane that divides the underfill layer into a first zone between theplane and the microelectronic component and a second zone opposite thefirst zone, and wherein moving the electrically charged filler elementscomprises moving at least a portion of the electrically charged fillerelements from the second zone to the first zone.
 55. The method of claim51 wherein the microelectronic device comprises a microelectroniccomponent, wherein the electrical couplers include a proximal endproximate to the microelectronic component and a distal end opposite theproximal end, wherein underfill layer includes a first surface proximateto the microelectronic component, a second surface opposite the firstsurface, a first zone, and a second zone extending between the secondsurface and the distal end of one of the electrical couplers, whereinthe second zone is generally hemispherical, and wherein moving theelectrically charged filler elements comprises moving at least a portionof the electrically charged filler elements from the second zone to thefirst zone.
 56. A method for attaching a substrate to a microelectronicdevice including a microelectronic component and a plurality ofelectrical couplers electrically coupled to the microelectroniccomponent, the method comprising: flowing an underfill materialincluding a plurality of electrically charged filler elements onto themicroelectronic device and covering at least a portion of the electricalcouplers; applying an electric field to the underfill material to moveat least a portion of the electrically charged filler elements withinthe underfill material; at least partially curing the underfillmaterial; and attaching a contact of the substrate to one of theplurality of electrical couplers of the microelectronic device.
 57. Themethod of claim 56 wherein attaching the substrate to themicroelectronic device comprises forming a fillet with the underfillmaterial.
 58. The method of claim 56 wherein the microelectronic devicecomprises a microelectronic component, wherein the electrical couplersinclude a proximal end proximate to the microelectronic component and adistal end opposite the proximal end, wherein the distal ends of theelectrical couplers define a plane that divides the underfill materialinto a first zone between the plane and the microelectronic componentand a second zone opposite the first zone, and wherein applying theelectric field comprises moving at least a portion of the electricallycharged filler elements from the second zone to the first zone.
 59. Themethod of claim 56 wherein the microelectronic device includes amicroelectronic component, wherein the electrical couplers include aproximal end proximate to the microelectronic component and a distal endopposite the proximal end, wherein underfill material includes a firstsurface proximate to the microelectronic component, a second surfaceopposite the first surface, a first zone, and a second zone extendingbetween the second surface and the distal end of one of the electricalcouplers, wherein the second zone is generally hemispherical, andwherein applying the electric field comprises moving at least a portionof the electrically charged filler elements from the second zone to thefirst zone.
 60. A method of underfilling a microelectronic deviceassembly including a microelectronic component, a substrate, and aplurality of electrical couplers coupling the microelectronic componentto the substrate, the method comprising: disposing an underfill layerincluding a plurality of electrically charged filler elements betweenthe microelectronic component and the substrate; and moving at least aportion of the plurality of electrically charged filler elements withinthe underfill layer by applying an electric field to the underfilllayer.
 61. The method of claim 60 wherein the electrically chargedfiller elements comprise silica, and wherein disposing the underfilllayer comprises disposing the underfill layer including a plurality ofelectrically charged silica filler elements.
 62. The method of claim 60wherein moving the filler elements comprises moving at least a portionof the electrically charged filler elements from a first zone in theunderfill layer to a second zone in the underfill layer.
 63. The methodof claim 60 wherein a plane divides the underfill layer into a firstzone having a first concentration of electrically charged fillerelements and a second zone having a second concentration of electricallycharged filler elements, wherein the plane is generally parallel to themicroelectronic component and is between the microelectronic componentand the substrate, wherein the first zone includes the portion of theunderfill layer between the plane and the microelectronic component andthe second zone includes the portion of the underfill layer between theplane and the substrate, and wherein moving the filler elementscomprises moving at least a portion of the electrically charged fillerelements from the first zone to the second zone so that the firstconcentration of electrically charged filler elements is less than thesecond concentration.
 64. The method of claim 60 wherein a plane dividesthe underfill layer into a first zone having a first concentration ofelectrically charged filler elements and a second zone having a secondconcentration of electrically charged filler elements, wherein the planeis generally parallel to the microelectronic component and is betweenthe microelectronic component and the substrate, wherein the first zoneincludes the portion of the underfill layer between the plane and themicroelectronic component and the second zone includes the portion ofthe underfill layer between the plane and the substrate, and whereinmoving the filler elements comprises moving at least a portion of theelectrically charged filler elements from the second zone to the firstzone so that the first concentration of electrically charged fillerelements is greater than the second concentration.
 65. The method ofclaim 60 wherein a plane divides the underfill layer into a first zonehaving a first coefficient of thermal expansion and a second zone havinga second coefficient of thermal expansion, wherein the plane isgenerally parallel to the microelectronic component and is between themicroelectronic component and the substrate, wherein the first zoneincludes the portion of the underfill layer between the plane and themicroelectronic component and the second zone includes the portion ofthe underfill layer between the plane and the substrate, and whereinmoving the filler elements comprises moving at least a portion of theelectrically charged filler elements from the first zone to the secondzone so that the first coefficient of thermal expansion is greater thanthe second coefficient of thermal expansion.
 66. The method of claim 60wherein a plane divides the underfill layer into a first zone having afirst coefficient of thermal expansion and a second zone having a secondcoefficient of thermal expansion, wherein the plane is generallyparallel to the microelectronic component and is between themicroelectronic component and the substrate, wherein the first zoneincludes the portion of the underfill layer between the plane and themicroelectronic component and the second zone includes the portion ofthe underfill layer between the plane and the substrate, and whereinmoving the filler elements comprises moving at least a portion of theelectrically charged filler elements from the second zone to the firstzone so that the first coefficient of thermal expansion is less than thesecond coefficient of thermal expansion.
 67. A method of underfilling amicroelectronic device assembly, the method comprising: disposing anunderfill layer including a plurality of electrically charged fillerelements between a microelectronic component and a substrate coupled tothe microelectronic component by electrical couplers; and applying anelectric field to the underfill layer to manipulate at least a portionof the electrically charged filler elements.
 68. The method of claim 67wherein the electrically charged filler elements comprise silica, andwherein disposing the underfill layer comprises disposing the underfilllayer including a plurality of electrically charged silica fillerelements.
 69. The method of claim 67 wherein applying the electric fieldcomprises moving at least a portion of the electrically charged fillerelements within the underfill layer from a first zone to a second zone.70. The method of claim 67 wherein a plane divides the underfill layerinto a first zone having a first concentration of electrically chargedfiller elements and a second zone having a second concentration ofelectrically charged filler elements, wherein the plane is generallyparallel to the microelectronic component and is between themicroelectronic component and the substrate, wherein the first zoneincludes the portion of the underfill layer between the plane and themicroelectronic component and the second zone includes the portion ofthe underfill layer between the plane and the substrate, and whereinapplying the electric field comprises moving at least a portion of theelectrically charged filler elements from the first zone to the secondzone so that the first concentration of electrically charged fillerelements is less than the second concentration.
 71. The method of claim67 wherein a plane divides the underfill layer into a first zone havinga first concentration of electrically charged filler elements and asecond zone having a second concentration of electrically charged fillerelements, wherein the plane is generally parallel to the microelectroniccomponent and is between the microelectronic component and thesubstrate, wherein the first zone includes the portion of the underfilllayer between the plane and the microelectronic component and the secondzone includes the portion of the underfill layer between the plane andthe substrate, and wherein applying the electric field comprises movingat least a portion of the electrically charged filler elements from thesecond zone to the first zone so that the first concentration ofelectrically charged filler elements is greater than the secondconcentration.
 72. The method of claim 67 wherein a plane divides theunderfill layer into a first zone having a first coefficient of thermalexpansion and a second zone having a second coefficient of thermalexpansion, wherein the plane is generally parallel to themicroelectronic component and is between the microelectronic componentand the substrate, wherein the first zone includes the portion of theunderfill layer between the plane and the microelectronic component andthe second zone includes the portion of the underfill layer between theplane and the substrate, and wherein applying the electric fieldcomprises moving at least a portion of the electrically charged fillerelements from the first zone to the second zone so that the firstcoefficient of thermal expansion is greater than the second coefficientof thermal expansion.
 73. The method of claim 67 wherein a plane dividesthe underfill layer into a first zone having a first coefficient ofthermal expansion and a second zone having a second coefficient ofthermal expansion, wherein the plane is generally parallel to themicroelectronic component and is between the microelectronic componentand the substrate, wherein the first zone includes the portion of theunderfill layer between the plane and the microelectronic component andthe second zone includes the portion of the underfill layer between theplane and the substrate, and wherein applying the electric fieldcomprises moving at least a portion of the electrically charged fillerelements from the second zone to the first zone so that the firstcoefficient of thermal expansion is less than the second coefficient ofthermal expansion.
 74. A method of underfilling a microelectronic deviceassembly including a microelectronic component, a substrate, andelectrical couplers coupling the microelectronic component to thesubstrate, the method comprising disposing an underfill layer includinga plurality of electrically charged filler elements between themicroelectronic component and the substrate so that the filler elementsare distributed generally uniformly throughout the underfill layer. 75.The method of claim 74, further comprising manipulating at least aportion of the electrically charged filler elements.
 76. The method ofclaim 74 wherein the electrically charged filler elements comprisesilica, and wherein disposing the underfill layer comprises disposingthe underfill layer including a plurality of electrically charged silicafiller elements.
 77. The method of claim 74 wherein the microelectroniccomponent comprises a microelectronic die, and wherein disposing theunderfill layer comprises disposing the underfill layer between themicroelectronic die and the substrate.
 78. A method of underfilling amicroelectronic device assembly including a microelectronic component, asubstrate, and electrical couplers coupling the microelectroniccomponent to the substrate, the method comprising: disposing anunderfill layer including a plurality of electrically charged fillerelements between the microelectronic component and the substrate,wherein the underfill layer has a zone having a coefficient of thermalexpansion; and changing the coefficient of thermal expansion of the zoneby applying an electric field to the underfill layer to manipulate atleast a portion of the electrically charged filler elements.
 79. Themethod of claim 78 wherein the electrically charged filler elementscomprise silica, and wherein disposing the underfill layer comprisesdisposing the underfill layer including a plurality of electricallycharged silica filler elements.
 80. The method of claim 78 whereinchanging the coefficient of thermal expansion comprises moving out ofthe zone at least a portion of the electrically charged filler elements.81. The method of claim 78 wherein changing the coefficient of thermalexpansion comprises moving into the zone at least a portion of theelectrically charged filler elements.
 82. The method of claim 78 whereina plane generally parallel to the microelectronic component and betweenthe microelectronic component and the substrate defines the zone,wherein the zone includes the portion; of the underfill layer betweenthe plane and the microelectronic component, and wherein changing thecoefficient of thermal expansion of the zone comprises moving at least aportion of the electrically charged filler elements out of the zone. 83.The method of claim 78 wherein a plane generally parallel to themicroelectronic component and between the microelectronic component andthe substrate defines the zone, wherein the zone includes the portion ofthe underfill layer between the plane and the microelectronic component,and wherein changing the coefficient of thermal expansion of the zonecomprises moving at least a portion of the electrically charged fillerelements into the zone.
 84. A composition for use in an underfill layerof a microelectronic device, comprising: a flowable binder having afirst state in which the binder is flowable and a second state with agreater viscosity than the first state; and a plurality of electricallycharged filler elements disposed within the flowable binder.
 85. Thecomposition of claim 84 wherein the electrically charged filler elementscomprise silica.
 86. The composition of claim 84 wherein theelectrically charged filler elements comprise silicon nitride.
 87. Thecomposition of claim 84 wherein the electrically charged filler elementscomprise aluminum oxide.
 88. The composition of claim 84 wherein theelectrically charged filler elements comprise aluminum nitride.
 89. Thecomposition of claim 84 wherein the flowable binder comprises a liquidpolymer.